A well-design facility layout planning refers to the reduction of the operation cost in the manufacturing and service industry. This work consists of reliability analysis of facility layout for an operating theatre; it aims at proposing a new evaluation approach, which integrated the fuzzy analytic hierarchy process and human reliability tool, for optimization of facility layout design with safety and human factors in an operating theatre. Firstly, the systematic layout planning is used to design the layout schemes on the basis of field investigations. Then, the criteria system is proposed based on human reliability analysis from four perspectives: software, hardware, environment, and liveware. Finally, the fuzzy analytic hierarchy process, a fuzzy extension of the multicriteria decision-making technique analytic hierarchy process, is used to compare these layout schemes based on the criteria system. The results that are obtained reveal interesting properties of facility layout planning in hospitals. It reveals that decision in selecting a suitable layout must meet not only the strategies and goals of the system but also meet the safety, security, and reliability of the system.