The role of а buffer layer at the contact with silicon in structures with an insulating gap made of a material replacing SiO2

Goldman, Evgeny; Chucheva, Galina; Belorusov, Dmitry

doi:10.1016/j.ceramint.2023.12.286

Ceramics International

2024

DOI: 10.1016/j.ceramint.2023.12.286

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The role of а buffer layer at the contact with silicon in structures with an insulating gap made of a material replacing SiO2

Evgeny Goldman,

Galina Chucheva,

Dmitry Belorusov

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The role of а buffer layer at the contact with silicon in structures with an insulating gap made of a material replacing SiO2

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References 9 publications

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