2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM) 2023
DOI: 10.1109/edm58354.2023.10225098
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The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition

Darya E. Petukhova,
Vadim N. Kichay,
Mikhail S. Lebedev
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