The study of temperature properties of I.H.P. structure and its application for filters on surface acoustic waves

Abstract

The results of investigation of temperature properties of I.H.P.-structures on multilayer lithium tantalate/silicon dioxide film/silicon substrate used to improve the characteristics of surface acoustic wave devices are presented. Finite element modeling of the test structures was performed in COMSOL software and the temperature frequency coefficient was calculated. A comparison of the calculated transmission coefficient of a resonator filter on a conventional 36°YX-cut lithium tantalate monocrystal substrate and an I.H.P.-filter at different temperature values is presented. The possibility of minimizing the temperature coefficient of frequency by selecting the thickness of the substrate layers is shown. Comparison of the obtained results with the known data showed good agreement. The practical significance consists in the use of modeling results and calculated parameters in the development of various classes of devices on multilayer substrates, including those with I.H.P.-structures.