The Study of the Structure Based on the Array of ZnO-Nanorods as a Sensor of the Gas Flow Rate

Abstract

This work shows the possibility of using arrays of ZnO nanorods grown on a glass substrate as a sensitive element for measuring air flow velocity. Since oxide semiconductors have a temperature dependence of resistance, a theoretical and experimental assessment was made of the influence of air velocity on the increase in resistance of a sensitive element. It has been theoretically shown that when air is blown through, the temperature of the free end of the ZnO nanorod can decrease by several degrees. An experimental evaluation showed that when gas is blown at a speed of 12.5 cm/s, the resistance of the sensing element increases by about 20%, which is equivalent to a temperature increase of about 4 degrees. In addition, it was found that the dependence of the increase in the resistance of the sensitive element when exposed to an air flow from 0 to 12.5 cm / s is close to linear.