Theoretical and experimental research on nanosecond laser cleaning of SiO2 particles on silicon wafer surface

Mei, Lifang; Lin, Long; Yan, Dongbing; Tian, Hongji; Liang, Yu; Chen, Shuixuan

doi:10.1007/s00170-023-12767-2

Int J Adv Manuf Technol

2023

DOI: 10.1007/s00170-023-12767-2

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Theoretical and experimental research on nanosecond laser cleaning of SiO2 particles on silicon wafer surface

Lifang Mei,

Long Lin,

Dongbing Yan

et al.

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Theoretical and experimental research on nanosecond laser cleaning of SiO2 particles on silicon wafer surface

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References 16 publications

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