Thermal flow sensors for MEMS spirometric devices

Hedrich, F.; Kliche, K.; Storz, M.; Billat, S.; Ashauer, M.; Zengerle, Roland

doi:10.1016/j.sna.2010.03.019

Cited by 39 publications

(16 citation statements)

References 3 publications

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“…Flow rate calibration was carried out using dry air with the hot film sensor operated in constant current mode at a 40-mA drive current. The third order polynomial calibration curves of the thermal flow sensor, which is quite similar to some reported in the literature [38,39], are depicted in Figure 14. Figure 15 presents the linearized calibration curve showing the sensitivity of 17.3 mV/(L/min) −0.1 .…”

Section: Resultssupporting

confidence: 73%

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Mansoor

Haneef

Akhtar

et al. 2016

Sensors

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An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA–0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C–1.79 mV/°C in the range 20–300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)−0.1 in the tested range of 0–4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.

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Section: Resultssupporting

confidence: 73%

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Mansoor

Haneef

Akhtar

et al. 2016

Sensors

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“…Flow sensors play an important role in various fields such as industrial processes, environmental monitoring [1] and in medical diagnostics [2] [3]. The principle of a flow measurement can be based on a variety of topologies and techniques and it can be divided into two main categories: thermal [4] [5] and nonthermal flow sensors [6] [7] [8].…”

Section: Introductionmentioning

confidence: 99%

Asymmetrical Sensing Configuration for Improved Sensitivity in Calorimetric High Flow Measurements in Constant Power Mode

et al. 2018

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“…Thanks to the rapid advance of microfabrication technology [3], thermal-type flow sensors are becoming increasingly prevalent in biomedical applications [4][5] [6] where the physical size of the sensor is of great importance. Thermal flow sensors require no moving parts, can be made very small and offer high sensitivity to low flow rates.…”

Section: Introductionmentioning

confidence: 99%

Design considerations and optimization of calorimetric flow sensor for respiratory monitoring

Kitsos¹,

Simeon

Demosthenous³

et al. 2016

2016 IEEE Biomedical Circuits and Systems Conference (BioCAS)

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This paper evaluates the impact of the operating modes, power consumption, and placement of temperature sensors against the heater to the design of a calorimetric flow sensor, for the range of 4.7 to 56.5 liters per minute (slm). In contrast to previous works most of which simply indicated the choice of various design parameters rather than providing a justification, this work provides useful guidelines for optimizing low-power small-area flow sensors for respiratory monitoring applications. A figure of merit (FoM) which is defined as the product of power consumption and sensor size, the two most challenging design parameters in developing small medical devices and systems, is proposed for quantifying flow sensor performance. Although the analysis and simulation was drawn upon designs in the mm scale, a similar optimization process can be applied to flow sensors of any size.

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Thermal flow sensors for MEMS spirometric devices

Cited by 39 publications

References 3 publications

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Asymmetrical Sensing Configuration for Improved Sensitivity in Calorimetric High Flow Measurements in Constant Power Mode

Design considerations and optimization of calorimetric flow sensor for respiratory monitoring

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