Transducers ’01 Eurosensors XV 2001
DOI: 10.1007/978-3-642-59497-7_339
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Thermal Flow Sensors for Very Small Flow Rate

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Cited by 18 publications
(10 citation statements)
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“…Ashauer et al [8], for example, report on such a sensor, that is based on a thermotransfer measuring principle.…”
Section: Flow Sensormentioning
confidence: 98%
“…Ashauer et al [8], for example, report on such a sensor, that is based on a thermotransfer measuring principle.…”
Section: Flow Sensormentioning
confidence: 98%
“…1. The channel fabrication is performed by a double KOH etching process (DKOH) at the back side of our standard flow sensor chip [10]. Fig.…”
Section: Realizationmentioning
confidence: 99%
“…For example an extension of the membrane from 300 µm to 380 µm width induces a sensitivity increase of about 40% in air for a 1 mm! channel cross section in case of our standard flow sensor [10]. Furthermore free degree of channel design is given by RIE etching which allows the realization of meanders for the fluid channel on an optimized reduced silicon area.…”
Section: Realisationmentioning
confidence: 99%