2020
DOI: 10.26434/chemrxiv.13077386.v1
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Thermal Ranges and Figures of Merit for Gold-Containing Precursors For ALD

Matthew B. E. Griffiths1,
Zachary Dubrawski2,
Peter Gordon3
et al.

Abstract: A survey of known gold-containing chemical vapour deposition (CVD) and atomic layer deposition (ALD) precursors, with a focus on collecting their volatilization and decomposition data. These data were applied to a figure of merit (σ) developed to easily assess the thermal characteristics.

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