Organometallic Vapor-Phase Epitaxy 1999
DOI: 10.1016/b978-012673842-1/50005-3
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Thermodynamics

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Cited by 83 publications
(127 citation statements)
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“…GaN cannot be directly grown on SiC (Refs. [15][16][17][18] at the normal deposition temperatures used to produce nitridebased LED structures. Instead, a nucleation layer must be grown that is sufficiently closely matched in chemistry, crystallography, lattice parameters, and the coefficients of thermal expansion with the substrate and the subsequently grown layer.…”
mentioning
confidence: 99%
“…GaN cannot be directly grown on SiC (Refs. [15][16][17][18] at the normal deposition temperatures used to produce nitridebased LED structures. Instead, a nucleation layer must be grown that is sufficiently closely matched in chemistry, crystallography, lattice parameters, and the coefficients of thermal expansion with the substrate and the subsequently grown layer.…”
mentioning
confidence: 99%
“…H and Sb as dual surfactants were reported to enhance Zn incorporation in GaP [39]. During the standard OMVPE growth processes, hydrogen is a common unavoidable impurity [48,49], often decomposed from precursors or carrier gases [50]. As a result, hydrogen-involved surface reconstructions have also been reported on the polar surfaces of ZnO [51][52][53][54][55] and GaN [56,57] both in experiments and theories.…”
Section: Introductionmentioning
confidence: 91%
“…32 Carbon also has the advantage of being an intrinsic dopant and therefore can be controlled using the epitaxial growth conditions in metal-organic vapor-phase epitaxy. 33 However, this use of traps to make the material more insulating must be carefully controlled, as carbon has been identifi ed as a potential source of current collapse. 27 A commonly discussed aspect in the development of GaN heteroepitaxy is the impact of the high density of dislocations, typically around 1 × 10 9 cm -2 .…”
Section: The Materials Challengementioning
confidence: 99%