Thickness-dependent ferroelectric phase evolution in doped HfO&lt;sub&gt;2&lt;/sub&gt;

Xu, Lan

doi:10.7567/ssdm.2017.k-5-03

Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials 2017

DOI: 10.7567/ssdm.2017.k-5-03

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Thickness-dependent ferroelectric phase evolution in doped HfO<sub>2</sub>

Lan Xu¹

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Thickness-dependent ferroelectric phase evolution in doped HfO<sub>2</sub>

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