1995
DOI: 10.1063/1.1146444
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Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering

Abstract: A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density … Show more

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Cited by 57 publications
(40 citation statements)
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“…For the measurements of the radial gradient length, the same set-up is used as for the previously reported global Thomson scattering measurements [9,23]. The main difference is that now the laser beam is focused at the position of the plasma, in order to obtain a good spatial resolution.…”
Section: Experimental Determination Of the Gradient Lengthmentioning
confidence: 99%
See 1 more Smart Citation
“…For the measurements of the radial gradient length, the same set-up is used as for the previously reported global Thomson scattering measurements [9,23]. The main difference is that now the laser beam is focused at the position of the plasma, in order to obtain a good spatial resolution.…”
Section: Experimental Determination Of the Gradient Lengthmentioning
confidence: 99%
“…The main difference is that now the laser beam is focused at the position of the plasma, in order to obtain a good spatial resolution. In the past [23] the focus of the laser beam was situated behind the plasma to avoid the possibility that stray light from the ablation of dust particles is detected during the calibration procedure. To avoid interference with this signal a dust free chamber is constructed surrounding the plasma, for the measurements presented now.…”
Section: Experimental Determination Of the Gradient Lengthmentioning
confidence: 99%
“…However, it gives valuable information on the 4s density [8]. ¹homson scattering is the scattering of electromagnetic (EM) radiation by free (or loosely bound) electrons [9,10]. It can be seen as a combination of two processes: the forced vibration of electrons absorbing the radiation and emission by these oscillating charges.…”
Section: Passive Spectroscopymentioning
confidence: 99%
“…Raman scattering offers the advantage that the scattered signal is at different wavelengths with respect to stray light and Rayleigh scattering. Raman calibration has been used by De Regt et al [20] and van Gessel et al [21]; hence it represents an alternative method for the absolute calibration.…”
Section: Measuring Procedures and Data Analysismentioning
confidence: 99%
“…The Raman calibration method is similar to the one used by de Regt et al [20] and van de Sande et al [22]. The scattered Raman power, P RM , was obtained from the fitting of the characteristic nitrogen Raman spectrum at a controlled pressure and temperature [26] and thus for a known gas density n g .…”
Section: A Calibrationmentioning
confidence: 99%