Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure

Raeann, Jesma R.; Singh, Shalini; Seena, V.

doi:10.1109/icee50728.2020.9777051

2020 5th IEEE International Conference on Emerging Electronics (ICEE) 2020

DOI: 10.1109/icee50728.2020.9777051

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Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure

Jesma R. Raeann,

Shalini Singh,

V. Seena

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Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure

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References 12 publications

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