Abstract:Articles you may be interested inExperimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge J. Appl. Phys. 117, 093301 (2015) Abstract. Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filte… Show more
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