2023
DOI: 10.1063/5.0151432
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Three robust temperature-drift compensation strategies for a MEMS gravimeter

Abstract: Gravimeters fabricated with MEMS suffer from temperature-dependent drifts in their long-term stability. We analyze the thermal contributions to the signal, and we propose three mechanisms to mitigate their effects. The first one uses materials that fulfill the condition αE=−2α, where thermal expansion is canceled by the temperature variation of Young’s modulus. The second one uses the thermal expansion to introduce a compression that compensates variation in the force of the spring. In the third one, expansion… Show more

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