Throughput and production data on the GSD-HE using the continuous variable aperture

Wainwright, L.; Merrill, J. L.; Fakhreddine, H.

doi:10.1109/iit.2000.924167

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)

DOI: 10.1109/iit.2000.924167

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Throughput and production data on the GSD-HE using the continuous variable aperture

L. Wainwright

J. L. Merrill²,

H. Fakhreddine³

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Throughput and production data on the GSD-HE using the continuous variable aperture

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