Tiled-Grating Rotation Detecting Technology

Lan, 夏兰 Xia; Xuedong, 杨学东 Yang; Guang, 徐光 Xu; Yaping, 戴亚平 Dai

doi:10.3788/cjl20113803.0308001

中国激光

2011

DOI: 10.3788/cjl20113803.0308001

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Tiled-Grating Rotation Detecting Technology

夏兰 Xia Lan¹,

杨学东 Yang Xuedong²,

徐光 Xu Guang³

et al.

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Translational offset detection based on far-field intensity for grating tiling

Huang

Fang

et al. 2011

2011 IEEE International Conference on Mechatronics and Automation

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The far-field intensity is detected from far-field image to estimate the piston distance between two gratings. The image processing algorithm includes projections along the horizontal and vertical directions, search for each focal spot's centre, feature extraction and intensity computation. Each focal spot's centre can be found with the projections. A self-growing method is used for feature extraction, where the threshold value depends on the gray value of each focal spot's centre. For each focal spot, the sum of gray values within the relevant domain is taken to be its energy intensity. Furthermore, the energy ratio of left and main focal spots (or main and right focal spots) is computed. A formula that expresses the piston distance between two gratings as the function of the energy ratio is fitted with several measured points. Based on this formula, the piston distance is obtained for a new energy-ratio. Finally, the proposed method is verified with a series of experiments.

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Translational offset detection based on far-field intensity for grating tiling

Huang

Fang

et al. 2011

2011 IEEE International Conference on Mechatronics and Automation

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show abstract

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Tiled-Grating Rotation Detecting Technology

Cited by 1 publication

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Translational offset detection based on far-field intensity for grating tiling

Translational offset detection based on far-field intensity for grating tiling

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