Time stability characterization of quadrupole mass spectrometers

Elkatmis, Alper; Kangi, Rifat; Becker, Ute; Jousten, Karl; Mari, D.; Boineau, Frédéric; Vičar, Martin; Ruiz, Salustiano; Šetina, Janez

doi:10.1016/j.measurement.2020.108143

Cited by 4 publications

(1 citation statement)

References 27 publications

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“…Unfortunately, the indicated partial pressures of QMS are highly unreliable: The total pressure, the composition of the gas mixture, the settings and the operational history of QMS (long-term instability) [9], to name a few, have a significant influence on the measured signal, its uncertainty and interpretation. For this reason, it is not possible to calibrate QMS for all its possible applications.…”

Section: Vacuum Gauge Calibrationmentioning

confidence: 99%

ISO standards for vacuum metrology

Jousten

2024

Proceedings of the 7th IMEKO TC16 Conference on Pressure and Vacuum Measurement

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During the last decade, several important standards and technical specifications (TS) for vacuum metrology have been published by the International Organisation for Standardisation (ISO) or are under development. The pressure ranges for high and ultrahigh vacuum have been redefined, and extreme high vacuum has been defined internationally for the first time. Basic standards describing vacuum gauge calibration equipment and methods, as well as the uncertainties associated with a calibration, are supplemented by specific standards for characterising or calibrating specific vacuum gauges. Procedures have also been developed for the characterisation of quadrupole mass spectrometers for partial pressure measurement and for the measurement of outgassing rates in a traceable and comparable manner. A TS for the design of a high-precision ionisation vacuum gauge has recently been published. Reliable vacuum measurement is also important for characterising the performance of vacuum pumps.

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Section: Vacuum Gauge Calibrationmentioning

confidence: 99%