TiO<sub>2</sub> microring resonators with high Q and compact footprint fabricated by a bottom-up method

Li, Gaoyuan; Fu, Meicheng; Zheng, Yi; Guan, Xiaowei

doi:10.1364/ol.400644

Cited by 9 publications

(8 citation statements)

References 26 publications

(57 reference statements)

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“…The benefits of a large FE 2 are pronounced, regarding that an FWM CE of −25 dB can be achieved here with a pump power of 16 dBm, while that is only −31 dB for the 136.37-μm-radius TiO 2 MRR under the same pump power. Previously, we have achieved Q ∼ 1.0 × 10 5 in a racetrack-type TiO 2 MRR with R 10 μm and straight regions being 40 μm long in total (corresponding to an effective radius of 16.37 μm of a ring-type MRR [43]), which is calculated to exhibit comparable FE 2 and F P with the present results. Nevertheless, the bottom-up fabrication method for that TiO 2 MRRs may be limited by its poor scalability.…”

Section: Discussionsupporting

confidence: 86%

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Zheng

et al. 2021

Photon. Res.

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Microring resonators (MRRs) with ultracompact footprints are preferred for enhancing the light-matter interactions to benefit various applications. Here, ultracompact titanium dioxide (TiO 2 ) MRRs with sub-10-μm radii are experimentally demonstrated. Thanks to the large refractive index of TiO 2 , the quality factors up to ∼7.9 × 10 4 and ∼4.4 × 10 4 are achieved for TiO 2 MRRs with radii of 10 μm and 6 μm, respectively, which result in large nonlinear power enhancement factors (>113) and large Purcell factors (>56). The four-wave mixing (FWM) measurements indicate that, compared to the large MRR, the FWM conversion efficiency of the ultracompact TiO 2 MRRs can be greatly improved (e.g., −25 dB versus −31 dB), a harbinger of significant superiorities. Demonstrations in this work provide more arguments for the TiO 2 waveguides as a promising platform for various on-chip photonic devices.

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Section: Discussionsupporting

confidence: 86%

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Zheng

et al. 2021

Photon. Res.

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“…Waveguides based on the CMOS-compatible metal oxides such as titanium dioxide (TiO 2 ) and tantalum pentoxide (Ta 2 O 5 ) have also been proposed for nonlinear applications, but the TiO 2 waveguide [6], [7], [8] still have a large linear losses (3-8 dB/cm) and the Ta 2 O 5 waveguides [9] have a similarly small RI (2.05) as the Si 3 N 4 .…”

Section: Introductionmentioning

confidence: 99%

Slot Waveguides With Silicon-Rich Materials for Nonlinear Applications

Wang

et al. 2021

IEEE Photonics J.

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Slot waveguides based on silicon-rich materials are proposed and experimentally demonstrated, which consist of a silicon-rich oxide (SRO) slot layer sandwiched by two silicon-rich nitride (SRN) layers. Measurements show the waveguides have a low propagation loss of ∼2.2 dB/cm and a 50-µm-radius micro-ring resonator can achieve a loaded quality factor (Q load ) of ∼10 5 . Four-wave mixing experiments in the slot waveguides reveal a high nonlinearity γ of 16 W −1 m −1 of the waveguide and an averaged nonlinear index n 2 of 2.5 x 10 −18 m 2 /W of the silicon-rich materials, 10 times larger than that of stoichiometric silicon nitride (Si 3 N 4 ). Supercontinuum generation (SCG) experiments have shown a large fabrication tolerance of such slot waveguides that 1.2 octave spectral broadening in a 1510-nm-wide slot waveguide can be achieved while that is 0.9 octave in a slot waveguide with a width shrinking as large as 220 nm.

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“…2−7 It has a higher nonlinear refractive index than other visible-transparent materials, such as SiO 2 and Si 3 N 4 , 3,5,6 which is important for nonlinear applications. Also, it possesses a negative thermo-optic coefficient, [2][3][4]6,7 which can be applied to producing athermal photonic components.…”

Section: Introductionmentioning

confidence: 99%

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

Rola,

Duda,

Gorantla

et al. 2024

ACS Appl. Nano Mater.

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Titanium dioxide (TiO2) is an attractive material for planar photonics; thus, the fabrication of TiO2 micro- and nanostructures has been a topic of many reports in recent years. In this work, we have presented systematic studies on focused electron beam (e-beam) micro- and nanopatterning of sol–gel-derived layers based on different alkoxide precursors of TiO2 stabilized with benzoylacetone (BzAc). The e-beam method is a flexible high-resolution technique, whereas the use of the sol–gel process, which utilizes precursors of titania in the condensed phase, enables lower electron doses in comparison to gas-phase precursors from injection systems. As the sol–gel process is relatively complex, we analyzed the effect of different process parameters on the patterning. It has given us insight into the phenomena related to the e-beam irradiation of sol–gel-derived layers based on titanium alkoxide precursors. We have examined patterned films using scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, ellipsometry, and profilometry. We have shown that the role of the alkoxy chain length in the processing of sol–gel-derived layers is more significant in the case of alcohol solvents than titania precursors. Moreover, high-resolution periodic nanostructures with steep sidewalls and high aspect ratio can be patterned, especially when the molar ratio of BzAc to titanium alkoxide in sol is increased from 1:1 to 2:1. Although the patterned films have a high concentration of carbon, it can be completely removed by annealing at 500 °C. This heat treatment leads to an increase in the refractive index from 1.59 to 2.11 (at the wavelength of 632.8 nm), but the patterned film turns polycrystalline in the nanoscale, showing the anatase phase of TiO2. The obtained results indicate that the investigated patterning method can be potentially applied for direct writing of planar photonic components with nanoscale features such as grating couplers for sensors. Nevertheless, the fabrication of high-quality TiO2 structures still needs optimization.

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TiO₂ microring resonators with high Q and compact footprint fabricated by a bottom-up method

Cited by 9 publications

References 26 publications

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Slot Waveguides With Silicon-Rich Materials for Nonlinear Applications

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

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TiO2 microring resonators with high Q and compact footprint fabricated by a bottom-up method

Cited by 9 publications

References 26 publications

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Ultra-compact titanium dioxide micro-ring resonators with sub-10-μm radius for on-chip photonics

Slot Waveguides With Silicon-Rich Materials for Nonlinear Applications

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics

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Product

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TiO₂ microring resonators with high Q and compact footprint fabricated by a bottom-up method

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics