Thin Solid Films
 2022
DOI: 10.1016/j.tsf.2021.138991
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Titanium oxide thin films stoichiometric composition dependence on the oxygen flow at magnetron sputtering

S. V. Bulyarskiy
1
,
Daria A. Koiva
2
,
V. S. Belov
3
et al.
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Cited by 7 publications
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