2011
DOI: 10.1504/ijnm.2011.043687
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Topography simulation and vibration analysis of ultra-precision diamond flycutting micro V-groove

Abstract: Ultra-precision diamond flycutting is an important method to manufacture micro V-groove with sub-micrometer form accuracy. The relative vibration between the tool and the work piece is one of the most critical factors which determine the manufacturing precision during the flycutting process. In order to restrain the vibration influence, a vibration analysing method in flycutting process is presented. The dynamical model of micro V-groove is established according to the character of ultra-precision diamond flyc… Show more

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Cited by 2 publications
(1 citation statement)
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“…This is because the ultra-precision cutting method can precisely generate 3D shape micro-structures, and not be influenced by substrate materials. Therefore, the linear micro-groove arrays developed by ultra-precision cutting have been investigated by many researchers (Lee et al, 2004;Kim and Loh, 2007;Zhao et al, 2009aZhao et al, , 2009bLiu et al, 2011).…”
Section: Introductionmentioning
confidence: 99%
“…This is because the ultra-precision cutting method can precisely generate 3D shape micro-structures, and not be influenced by substrate materials. Therefore, the linear micro-groove arrays developed by ultra-precision cutting have been investigated by many researchers (Lee et al, 2004;Kim and Loh, 2007;Zhao et al, 2009aZhao et al, , 2009bLiu et al, 2011).…”
Section: Introductionmentioning
confidence: 99%