2023 21st IEEE Interregional NEWCAS Conference (NEWCAS) 2023
DOI: 10.1109/newcas57931.2023.10198138
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Toward 2.5D Structures for Multi-Channel MEMS Acoustic-Based Digital Isolators using Through Silicon Openings

Hamid Sadrimanesh,
Yves Blaquière,
Frederic Nabki
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