2020 42nd Annual International Conference of the IEEE Engineering in Medicine &Amp; Biology Society (EMBC) 2020
DOI: 10.1109/embc44109.2020.9176103
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Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants

Kambiz Nanbakhsh
1
,
Riina Ritasalo
2
,
Wouter A. Serdijn
3
et al.
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