IEEE Sens. Lett.
 2024
DOI: 10.1109/lsens.2024.3374377
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Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation

Jingqian Xi,
Zhuoyue Zheng,
Huafeng Liu
et al.
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