Trace Analysis of Specialty and Electronic Gases 2013
DOI: 10.1002/9781118642771.ch7
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Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches

Abstract: Manufacturers and product names are given solely for completeness. These specific citations neither constitute an endorsement of the product nor imply that similar products from other companies would be less suitable.

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Cited by 9 publications
(15 citation statements)
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References 105 publications
(140 reference statements)
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“…Phosphorus pentoxide cells are used in the electrolysis of water vapor. This method is often considered to be a primary measurement method [23]. Electrodes are coated with a thin film of phosphorus pentoxide (P 2 O 5 ).…”
Section: Phosphorus Pentoxide Moisture Sensormentioning
confidence: 99%
See 2 more Smart Citations
“…Phosphorus pentoxide cells are used in the electrolysis of water vapor. This method is often considered to be a primary measurement method [23]. Electrodes are coated with a thin film of phosphorus pentoxide (P 2 O 5 ).…”
Section: Phosphorus Pentoxide Moisture Sensormentioning
confidence: 99%
“…The gold layer is permeable to moisture and conductive. Water vapor in the gas stream is transported rapidly through the gold layer and equilibrates in the aluminum oxide pore walls, affecting the dielectric constant of the material and as a result, the capacitance of the unit [23]. The sensor is capable of both µmol/mol and dew point measurements in most industrial gas streams, including hydrogen.…”
Section: Aluminium Oxide Moisture Sensormentioning
confidence: 99%
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“…Hardly any sensor except humidity, touches human life so much to meet its increasing demand in day to day life. Highly accurate and reliable moisture detection, in different environments, has become more and more important for environmental protection, technological processes, scientific R&D work, natural gas processing, healthcare, pharmaceutical industries, semiconductors, and food processing industries. Trace level detection is notoriously challenging due to the adsorption affinity of water on metal and other surfaces, along with potential interference from different gas moieties in the measurement process.…”
Section: Introductionmentioning
confidence: 99%
“…These sensors are robust and fairly inexpensive and are extensively used in inert or nonreactive gas matrices . The technology currently being used for measuring moisture at the trace level mostly includes spectroscopic methods: viz., tunable diode laser absorption spectroscopy, Fourier transform infrared spectroscopy, and chilled mirror technology. , However, a sensor-based technology that has appeared successfully in this regime is the capacitive metal oxide sensor; it has the potential to revolutionize the sensing domain, if exploited using new ideas and upcoming trends in technologies.…”
Section: Introductionmentioning
confidence: 99%