Transmission and reflection dual operational mode MEMS display device

Advanced MEMS-based technologies and displays

“…50 The fabrication of MEMS is evolved from semiconductor device 51 fabrication process. They are based upon conventional semicon- 52 ductor techniques and derive significant benefits from the past 53 experience and the update knowledge in the semiconductor indus- 54 try. On the basis of lithography, deposition, patterning and etching 55 processes are used to prepare MEMS.…”