Abstract:The physical properties of two-dimensional (2D) materials may drastically vary with their geometric thickness profiles. Current thickness profiling methods for 2D materials are limited in measurement throughput and accuracy. Here, we present a novel high-speed and high-precision thickness profiling method, termed transmission-matrix quantitative phase profilometry (TM-QPP). In TM-QPP, picometer-level optical pathlength sensitivity is enabled in both temporal and spatial domains by extending the photon shot-noi… Show more
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