The high stability and scalability of integrated circuits make them a reliable and practical platform for photonic quantum information processing. In various platforms for quantum photonic integrated circuits, the silicon‐on‐insulator technology, with its strong nonlinear effect and mature fabrication technology, has gradually emerged in the preparation of quantum photonic sources. This report presents a review of this series of research advances in the preparation of a quantum photonic source, based on the spontaneously four‐wave mixing process in a silicon waveguide, especially chip‐scale entangled states that have been realized in recent years.