Tungsten spectroscopy in the EUV range observed at a high-temperature superconducting electron-beam ion trap

Li, Wenxian; Shi, Zhongzhi; Yang, Yang; Xiao, Jun; Brage, Tomas; Hutton, R.; Zou, Yaming

doi:10.1103/physreva.91.062501

Cited by 29 publications

(40 citation statements)

References 31 publications

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“…Experimental investigations are hampered by the fact that plasmas, including plasma in electron-beam ion traps (EBITs) [19][20][21][22][23][24], that are typically required to produce ions in intermediate charge states, contain a mixture of ions of different charge states with overlapping spectral features. Charge-state-resolved spectra can be obtained using suitable subtractions of spectra acquired under various plasma conditions [25][26][27][28] or by employing genetic algorithms [29].…”

Section: Introductionmentioning

confidence: 99%

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

et al. 2020

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Extreme-ultraviolet (EUV) spectra of Sn 13+ −Sn 15+ ions have been measured in an electron-beam ion trap (EBIT). A matrix inversion method is employed to unravel convoluted spectra from a mixture of charge states typically present in an EBIT. The method is benchmarked against the spectral features of resonance transitions in Sn 13+ and Sn 14+ ions. Three new EUV lines in Sn 14+ confirm its previously established level structure. This ion is relevant for EUV nanolithography plasma but no detailed experimental data currently exist. We used the Cowan code for first line identifications and assignments in Sn 15+. The collisional-radiative modeling capabilities of the Flexible Atomic Code were used to include line intensities in the identification process. Using the 20 lines identified, we have established 17 level energies of the 4p 4 4d configuration as well as the fine-structure splitting of the 4p 5 ground-state configuration. Moreover, we provide state-of-the-art ab initio level structure calculations of Sn 15+ using the configuration-interaction many-body perturbation code AMBiT. We find that the here-dominant emission features from the Sn 15+ ion lie in the narrow 2% bandwidth around 13.5 nm that is relevant for plasma light sources for state-of-the-art nanolithography.

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Section: Introductionmentioning

confidence: 99%

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

et al. 2020

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“…For higher charge states, e.g. W 13+ , several observation using an EBIT have been reported [10,11,12] for the EUV region although the identification is still in controversy. In Ref.…”

Section: Introductionmentioning

confidence: 99%

Extreme ultraviolet spectra of multiply charged tungsten ions

Mita

Sakaue

Kato

et al. 2017

J. Phys.: Conf. Ser.

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“…Some of those computations, however, indicated that according to the computed level structure, the 5p levels would not be particularly highly populated either directly or via cascades except possibly in much more highly charged ions along the isoelectronic sequence [28,29]. To my knowledge, no one doubts that the Berlin group may well have observed EUV lines belonging to the Pm-like spectrum of tungsten, except for a recent paper from Shanghai [30]; the author list of this new paper includes one of the Berlin paper authors who so far had insisted that all was well. However, the Vilkas computations [28] have long since indicated that the prominent decays of the 5p levels proposed decades before would not materialize in reality.…”

Section: Complex Spectramentioning

confidence: 99%

Guest Editor’s Notes on the “Atoms” Special Issue on “Perspectives of Atomic Physics with Trapped Highly Charged Ions”

Trabert

2016

Atoms

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Abstract:The study of highly charged ions (HCI) was pursued first at Uppsala (Sweden), by Edlén and Tyrén in the 1930s. Their work led to the recognition that the solar corona is populated by such ions, an insight which forced massive paradigm changes in solar physics. Plasmas aiming at controlled fusion in the laboratory, laser-produced plasmas, foil-excited swift ion beams, and electron beam ion traps have all pushed the envelope in the production of HCI. However, while there are competitive aspects in the race for higher ion charge states, the real interest lies in the very many physics topics that can be studied in these ions. Out of this rich field, the Special Issue concentrates on atomic physics studies that investigate highly charged ions produced, maintained, and/or manipulated in ion traps. There have been excellent achievements in the field in the past, and including fairly recent work, they have been described by their authors at conferences and in the appropriate journals. The present article attempts an overview over current lines of development, some of which are expanded upon in this Special Issue.

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Tungsten spectroscopy in the EUV range observed at a high-temperature superconducting electron-beam ion trap

Cited by 29 publications

References 31 publications

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

EUV spectroscopy of highly chargedSn13+−Sn15+ions in an electron-beam ion trap

Extreme ultraviolet spectra of multiply charged tungsten ions

Guest Editor’s Notes on the “Atoms” Special Issue on “Perspectives of Atomic Physics with Trapped Highly Charged Ions”

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