Twin‐Probe Atomic Force Microscopy with Optical Beam Deflection Using Vertically Incident Lasers by Two Beam Splitter

Abstract

We developed a twin-probe atomic force microscopy (AFM) system using Si cantilever-probes. The system utilizes the optical beam deflection method in order to detect the deflection of each cantilever-probe mounted on each tube-type actuator. The cantilever-probes mounted on each actuator are able to realize independent control of the probe positions, which are attached to manual sliders. A sensitivity 90 fm/ √ H z or less is achieved for the displacement sensor activity for the two cantilever-probes. We succeeded in the simultaneous observation of a topographic image in the state in which they approached each other to within 40 μm. C⃝ 2016 Wiley Periodicals, Inc. Electron Comm Jpn, 99(9): 92-100, 2016; Published online in Wiley Online Library (wileyonlinelibrary.com).