Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision

Lin, Cunbao; Yan, Shuhua; Ding, Dan; Wang, Guochao

doi:10.1117/1.oe.57.6.064102

Cited by 18 publications

(5 citation statements)

References 38 publications

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“…Researchers found that an optical system with 340 interfaces produces about 57,000 first-order ghosts 12 . The trend of multi-axis, integration, and high optical subdivision to achieve higher resolution causes the structure of the interferometer to become increasingly complex, and the number of interfaces increase rapidly 13 , 14 . When the number of interfaces in the interferometer increases, the number of ghost reflection light generated at each interface increases sharply 12 .…”

Section: Introductionmentioning

confidence: 99%

“…12 The trend of multi-axis, integration, and high optical subdivision to achieve higher resolution causes the structure of the interferometer to become increasingly complex, and the number of interfaces increase rapidly. 13,14 When the number of interfaces in the interferometer increases, the number of ghost reflection light generated at each interface increases sharply. 12 In the imaging system, the optical path passes through the designed optical element in turn according to the sequence, and the analysis is relatively simple.…”

Section: Introductionmentioning

confidence: 99%

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Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Zhang

Xia

et al. 2023

Opt. Eng.

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Laser interferometers and grating interferometers based on optical interferometry are widely used in displacement measurement of precision machining and testing equipment, such as the measurement system of integrated circuit equipment, due to their high precision, noncontact, and large dynamic measurement range. The ghost reflection in optical elements may lead to the periodic nonlinear error of the interferometer and also reduce alternating current/direct current. We propose a general method for automatic ghost reflection interface identification. It can analyze the influence weight of ghost reflection for each interface of any interferometer. In addition, the manufacturing cost of the interferometer is effectively reduced by optimization algorithms that enable ghost reflection avoidance in the interferometer design. Experimental results prove the influence weight of ghost reflection at different positions in the interferometer and provide the parameter selection of the most suitable interface reflection of the interferometer.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Zhang

Xia

et al. 2023

Opt. Eng.

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“…Diffraction gratings serve as the key of many optical element and systems, such as spectral combining systems [1], chirped pulse amplification [2], and interferometer [3]. For these systems, in addition to high efficiency, the polarizationindependent properties of gratings are also important.…”

Section: Introductionmentioning

confidence: 99%

Polarization-independent high-efficiency two-dimensional metal-dielectric grating by frustum array

Wang,

Chen,

Wang

et al. 2023

Holography, Diffractive Optics, and Applications XIII

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“…Due to the optic-stress effects, the refractive index of the fiber will change [16][17][18]. There are many interferometers, and the measurement arms and the reference arms of these interferometers cannot be guaranteed to be parallel and coincident in use [19][20][21][22][23][24]. In some applications of interferometers with MMFs such as the relative displacement measurement of the dual wafer stage, the interferometers inevitably move with one stage [25].…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Errors Caused by Disturbed Multimode Fibers in the Interferometer with Fiber-Coupled Delivery

Xia

Zhang

Zhu

et al. 2020

Sensors

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In this paper, the errors of the displacement measurement interferometer with multi-mode fiber-coupled delivery are analyzed when the fibers are disturbed. Simulation results show that the characteristic frequency of the measurement error is consistent with that of disturbance, and the error has higher order frequency components. The experiments are designed for the effect of fringe contrast on the measurement error. The experimental results show that the measurement error is rather sensitive to the interference angle between the measurement arm and the reference arm in the multi-mode fibers, but not to the irradiance ratio of the measurement arm and the reference arm. In an interferometer with multimode fiber, the interference angle between the measurement arm and the reference arm needs to be restricted. This conclusion provides a theoretical basis for designing an interferometer measurement system with interference angle that is adaptive to wider application.

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Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision

Cited by 18 publications

References 38 publications

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Polarization-independent high-efficiency two-dimensional metal-dielectric grating by frustum array

Analysis of the Errors Caused by Disturbed Multimode Fibers in the Interferometer with Fiber-Coupled Delivery

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