1995
DOI: 10.1063/1.360186
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Two-dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

Abstract: Two-dimensional laser induced fluorescence measurements are applied to the chemical vapor deposition of diamond by an oxyacetylene flame. The fluorescence distributions of C2, CH, and OH are measured for various deposition conditions. The influence of the temperature of the molybdenum substrate and the distance between the substrate and the flame front on the two-dimensional distributions and on the quality and morphology of the deposited diamond is investigated. A relation is observed between the C2 distribut… Show more

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Cited by 48 publications
(69 citation statements)
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“…47.5:52.5ϭ0.90. 16 Experimentally, good diamond growth is obtained at an the excess acetylene of approximately S ac ϭ5%, corresponding to a feed gas composition of 48.72:51.28ϭ0.95 molar ratio of acetylene and oxygen. This value has been used in our simulations.…”
Section: A Reactor Geometrymentioning
confidence: 99%
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“…47.5:52.5ϭ0.90. 16 Experimentally, good diamond growth is obtained at an the excess acetylene of approximately S ac ϭ5%, corresponding to a feed gas composition of 48.72:51.28ϭ0.95 molar ratio of acetylene and oxygen. This value has been used in our simulations.…”
Section: A Reactor Geometrymentioning
confidence: 99%
“…13, which we have subsequently combined with a two-dimensional hydrodynamic model for laminar oxyacetylene flames. 14 These models were validated against experimental data [15][16][17][18] on growth rates and concentration profiles of gas phase intermediates C, CH, and H, as a function of flame-tip-to-substrate distance and substrate temperature. Our combined chemistry and hydrodynamic models were found to provide valuable insights in various important underlying mechanisms of oxyacetylene combustion CVD of diamond.…”
Section: Introductionmentioning
confidence: 99%
“…The total flow was kept at 5.4 slm, 19 which corresponds to a mean velocity of ͗v͘ϭ64 m/s. The composition of the feed gas is based on the composition of a neutral oxy-acetylene flame, which in practice is a 47.5:52.5ϭ0.9 molar ratio of acetylene and oxygen.…”
Section: ͑2͒mentioning
confidence: 99%
“…The composition of the feed gas is based on the composition of a neutral oxy-acetylene flame, which in practice is a 47.5:52.5ϭ0.9 molar ratio of acetylene and oxygen. 19 The excess acetylene is defined as the fraction of acetylene that is fed in excess to that of a neutral flame. Thus, a 5% excess of acetylene ͑Sacϭ5%͒ corresponds to a feed gas composition of 48.72:51.28ϭ0.95 molar ratio of acetylene and oxygen.…”
Section: ͑2͒mentioning
confidence: 99%
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