Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

Sasaki, Takashi; Piot, Adrien; Fleury, Clément; Guerreiro, Sara; Rocha, Rodrigo T.; Lagosh, Anton

doi:10.1109/mems58180.2024.10439446

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 2024

DOI: 10.1109/mems58180.2024.10439446

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Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

Takashi Sasaki,

Adrien Piot,

Clément Fleury

et al.

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Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

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References 14 publications

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