1995
DOI: 10.6028/jres.100.036
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Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

Abstract: Over the past few years multidimensional self-consistent plasma simulations including complex chemistry have been developed which are promising tools for furthering our understanding of reactive gas plasmas and for reactor design and optimization. These simulations must be benchmarked against experimental data obtained in well-characterized systems such as the Gaseous Electronics Conference (GEC) reference cell. Two-dimensional simulations relevant to the GEC Cell are reviewed in this paper with emphasis on fl… Show more

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Cited by 137 publications
(109 citation statements)
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“…Following the procedure described in Ref. [33], the boundary conditions at With the zero thermal flux at the discharge walls usually considered [28,32,34], the boundary condition for the electron energy flux at the walls …”
Section: Charged Particle Descriptionmentioning
confidence: 99%
“…Following the procedure described in Ref. [33], the boundary conditions at With the zero thermal flux at the discharge walls usually considered [28,32,34], the boundary condition for the electron energy flux at the walls …”
Section: Charged Particle Descriptionmentioning
confidence: 99%
“…Model researches on low pressure ICP discharges have been widely carried out and reported in the literature [9][10][11][12]. Lymberopoulos and Economou [9] reported their fluid model described in details, which includes fluid equations, electron-impact rate coefficients and transport properties, Maxwellf's equations as well as computational scheme.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore any potential in the kV range will accelerate electrons well above the thermal velocities and this must be taken into account. Therefore, boundary conditions similar to those found in [Lymberopoulos and Economou, 1995] Once the number densities reach a steady state distribution, the antenna currents and the currents within the sheath region are used to detennine the antenna pattern using a far-field transformation (Fig. 6).…”
Section: A2 Boundary Conditionsmentioning
confidence: 99%