Ultimate measurement speed for flexible asphere and freeform metrology: TWISS

Abstract

Asphere and freeform metrology forms the basis of precision optics fabrication. Stitching or scanning methods provide the necessary flexibility, but require measurement times of several minutes. Using parallel information channels of light (wavelength, polarization, phase) in combination with the model-based tilted wave interferometry approach boosts the measurement possibilities. In this proceeding we show how these information channels can be used to enhance the measurement capabilities regarding reconstruction quality and show how the complete shape information of strong aspheres can be recorded by TWISS (tilted wave interferometry single-shot) within milliseconds.