Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

Ríos, Carlos; Du, Qingyang; Zhang, Yifei; Popescu, Cosmin-Constantin; Shalaginov, Mikhail Y.; Miller, Paul D.; Roberts, Chris; Kang, Myungkoo; Adair, Kathleen; Gu, Tingyue; Vitale, Steven A.; Hu, Juejun

doi:10.48550/arxiv.2105.06010

Cited by 14 publications

(35 citation statements)

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“…This can be addressed by two new classes of PCMs, Sb 2 S 3 and Sb 2 Se 3 , which offer near zero loss in both amorphous and crystalline states [38], [39], [59]. Sb 2 Se 3 , in particular, has zero loss at both 1310 nm and 1550 nm and a large Δn ∼ 1, making it an ideal candidate for non-volatile phase-only control in near IR silicon photonics [60]. Sb 2 S 3 , on the other hand, is a wide-bandgap PCM that has broad transparency window from 610 nm to near IR in the amorphous state [38], [40].…”

Section: Phase Change Materials For Integrated Photonicsmentioning

confidence: 99%

“…Additionally, cyclability data was not reported for GST patch larger than 500 nm diameter. To electrically switch large patches (>1μm) of PCM, external transparent heaters have to be used, which can be realized by doping silicon [14], [60], [70], depositing transparent conductors [40], [71], [72], or transferring graphene [73], [74] onto the waveguides. The heater essentially functions as miniature hotplate that supplies Joule heating to the PCM placed above or beneath it.…”

Section: Phase Change Materials For Integrated Photonicsmentioning

confidence: 99%

“…On-chip optical switching will be difficult in this regard. For example, recently an electrically reconfigurable phase shifter has been demonstrated based on doped Si heater and low-loss PCMs Sb 2 Se 3 [60] that implements applications from 2 × 2 switch to optical trimming. The use of dense atomic layer deposited (ALD) Al 2 O 3 capping also improves the device cyclability to over 3000 cycles [14], [26].…”

Section: Waveguide Integrated Switches Based On Pcmsmentioning

confidence: 99%

“…5c]. Based on a similar design, transparent PCMs Sb 2 Se 3 was recently integrated with silicon microheaters to build an electrically reconfigurable phase shifter in Si microrings [60]. A microring switch based on another wide bandgap PCM Sb 2 S 3 [40] was also demonstrated using ITO heater that enables near phase-only modulation with no resonance broadening upon crystallization [Fig.…”

Section: Integrated Cavity-enhanced Switches Based On Pcmsmentioning

confidence: 99%

“…A different approach is to employ transparent PCMs and bypass any material loss. An electrically reconfigurable 2x2 switch based on the low-loss PCM Sb 2 Se 3 [60] is shown in Fig. 10a.…”

Section: Optical Routingmentioning

confidence: 99%

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Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Fang

Chen

Zheng

et al. 2022

IEEE J. Select. Topics Quantum Electron.

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The traditional ways of tuning a silicon photonic network are mainly based on the thermo-optic effect or the free carrier dispersion. The drawbacks of these methods are the volatile nature and the extremely small change in the complex refractive index (Δn<0.001). In order to achieve low energy consumption and smaller footprint for applications such as photonic memories, optical computing, programmable gate array, and optical neural network, it is essential that the two optical states of the system exhibit high optical contrast and remain non-volatile. Phase change materials (PCMs) such as Ge 2 Sb 2 Te 5 provide an excellent solution, thanks to the drastic contrast in refractive index between two states which can be switched reversibly and in a non-volatile fashion. Here, we review the recent progress in the field of non-volatile reconfigurable silicon photonics based on PCMs. We start with a general introduction to the material properties of PCMs that have been exploited in integrated photonics and discuss their operating wavelengths. The various photonic switches that are built upon these PCMs are reviewed. Lastly, we review the recent applications of PCM-based photonic integrated circuits and discuss the potential future directions of this field.

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Section: Phase Change Materials For Integrated Photonicsmentioning

confidence: 99%

Section: Phase Change Materials For Integrated Photonicsmentioning

confidence: 99%

Section: Waveguide Integrated Switches Based On Pcmsmentioning

confidence: 99%

Section: Integrated Cavity-enhanced Switches Based On Pcmsmentioning

confidence: 99%

“…A different approach is to employ transparent PCMs and bypass any material loss. An electrically reconfigurable 2x2 switch based on the low-loss PCM Sb 2 Se 3 [60] is shown in Fig. 10a.…”

Section: Optical Routingmentioning

confidence: 99%

See 3 more Smart Citations

Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Fang

Chen

Zheng

et al. 2022

IEEE J. Select. Topics Quantum Electron.

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Phase Transformation and Switching Behavior of Magnetron Plasma Sputtered Ge₂Sb₂Se₄Te

Vitale

Miller

Robinson

et al. 2022

Advanced Photonics Research

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Stand-alone memory chips incorporating chalcogenide phase change materials (PCMs) such as Ge 2 Sb 2 Te 5 (GST) have been available commercially for several years. These devices exploit the resistivity difference between the amorphous and crystalline phases to encode data. Operation is robust and reliable, in part because switching the phase of a very small volume of PCM material, less than 0.001 μm 3 , leads to a very large change in device resistance. [1] Recently, researchers have explored the use of PCMs incorporated into photonic devices to create reconfigurable nonvolatile elements for applications such as o ptical switching, [2] erasable photonics, [3] tunable filters, [4] active metasurfaces, [5] and neuromorphic computing. [6] PCM-enabled nonvolatile photonic devices have been demonstrated in which the PCM is deposited on one or more segments of a ring resonator, [7] Mach-Zender interferometer, [8] or waveguide directional coupler. [9] A difference in optical path length is generated by setting the PCM into an amorphous (low index) or crystalline (high index) state, and light is thereby directed to one or the other output port. The state of the PCM is set using a resistive heater element: a short, high-temperature pulse amorphizes the PCM,

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Dynamic Phase‐Change Metawaveplates for Advanced Wavefront Shaping

Cai

Ding

Chen

et al. 2022

Advanced Photonics Research

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Metasurfaces have recently gained increasing attention and shown great potential in replacing bulk optics with ultracompact flat metadevices, owing to their unprecedented capabilities of molding optical fields with surface‐confined configurations and exceedingly low losses. However, most existing metasurfaces are typically passive and feature well‐defined responses determined by material compositions and configurations, which severely limit the functionalities in intelligent and adaptive nanophotonics. Therefore, it is highly desired to realize active metasurfaces with dynamic modulation postfabrication. Herein, a highly efficient tunable metawaveplate at the telecom wavelength of 1.55 μm by structuring the phase‐change alloy Sb2Se3 is designed, which can switch from a half‐waveplate to a quarter‐waveplate once Sb2Se3 transits from the amorphous to the crystalline state. Capitalizing on the designed Sb2Se3 meta‐atom and the Pancharatnam–Berry phase, two switchable meta‐devices capable of actively shaping the wavefronts of the transmitted waves are proposed, including tunable beam steering and metalens with tailored focal intensity. The presented tunable metasurfaces can open new avenues for adaptive photonics with advanced functionalities.

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Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

Cited by 14 publications

References 0 publications

Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Phase Transformation and Switching Behavior of Magnetron Plasma Sputtered Ge₂Sb₂Se₄Te

Dynamic Phase‐Change Metawaveplates for Advanced Wavefront Shaping

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Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

Cited by 14 publications

References 0 publications

Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials

Phase Transformation and Switching Behavior of Magnetron Plasma Sputtered Ge2Sb2Se4Te

Dynamic Phase‐Change Metawaveplates for Advanced Wavefront Shaping

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Phase Transformation and Switching Behavior of Magnetron Plasma Sputtered Ge₂Sb₂Se₄Te