Ultra-dense and highly doped SiNWs for micro-supercapacitors electrodes

Thissandier, Fleur; Dupré, Ludovic; Gentile, P.; Brousse, Thierry; Bidan, Gérard; Buttard, D.; Sadki, Saı̈d

doi:10.1016/j.electacta.2013.11.097

Cited by 61 publications

(51 citation statements)

References 28 publications

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“…The gravimetric SC of 1.03 F/g~20 mV/s, 0.95 F/g~50 mV/s, and 0.90 F/g ~100 mV/s was obtained, normalized to the weight of both TiN and Si-NR. Those results are better than silicon nanowire supercapacitor (36.7 F/cm 2 ) [26], and carbon coated silicon nanowire electrode (105 F/cm 2 ) [41], also compare well with the results for diamond coated silicon nanowire electrode (1.5 mF/cm 2 ) [42]. As for Si/TiN electrode, 0.21, 0.18, and 0.15 mF/cm 2 were delivered at the corresponding test conditions.…”

Section: Resultssupporting

confidence: 68%

“…However, these materials are typically realized by deposition strategies that leave the underlying Si substrate unused and involve non IC compatible processes. This has stimulated development of supercapacitors based on silicon, where energy density was enhanced by nanofabricating porous silicon [25] and silicon nanowires [26,27]. However, pristine silicon nanostructures suffer from low conductivity and poor chemical stability.…”

Section: Introductionmentioning

confidence: 99%

“…5 The active electrodes were engineered by conformal coating nano layer TiN on the scaffold at lower temperature instead of using carbon materials. In comparison with silicon nanowires and nanoporous Si coated with carbon material, no expensive metal catalysts, high-temperature condition in chemical vapor deposition [26,27], and electrochemical etching [25, 2834] are needed. Our proof-of-concept device demonstrates the feasibility for fabricating the on-chip supercapacitors by monolithography integration.…”

Section: Introductionmentioning

confidence: 99%

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Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Øhlckers

Müller

et al. 2016

Electrochemistry Communications

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We demonstrate high aspect ratio silicon nanorod arrays by cyclic deep reactive ion etching (DRIE) process as a scaffold to enhance the energy density of a Si-based supercapacitor. By unique atomic layer deposition (ALD) technology, a conformal nano layer of TiN was deposited on the silicon nanorod arrays as the active material.The TiN coated silicon nanorods as a supercapacitor electrode lead to a 6 times improvement in capacitance compared to flat TiN film electrode.

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Section: Resultssupporting

confidence: 68%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Øhlckers

Müller

et al. 2016

Electrochemistry Communications

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“…Within this context, over the past years silicon nanowires (SiNWs) [17][18][19][20] and derivatives (e.g. silicon carbide nanowires, SiCNWs), [21][22][23] as innovative and attractive 1-D nanomaterials, have attracted a great deal of attention in the field of MSC devices.…”

Section: Introductionmentioning

confidence: 99%

Designing 3D Multihierarchical Heteronanostructures for High-Performance On-Chip Hybrid Supercapacitors: Poly(3,4-(ethylenedioxy)thiophene)-Coated Diamond/Silicon Nanowire Electrodes in an Aprotic Ionic Liquid

Aradilla

Gao

Lewes-Malandrakis

et al. 2016

ACS Appl. Mater. Interfaces

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A versatile and robust hierarchically multifunctionalized nanostructured material made of poly(3,4-(ethylenedioxy)thiophene) (PEDOT)-coated diamond@silicon nanowires has been demonstrated to be an excellent capacitive electrode for supercapacitor devices. Thus, the electrochemical deposition of nanometric PEDOT films on diamond-coated silicon nanowire (SiNW) electrodes using N-methyl-N-propylpyrrolidinium bis((trifluoromethyl)sulfonyl)imide ionic liquid displayed a specific capacitance value of 140 F g(-1) at a scan rate of 1 mV s(-1). The as-grown functionalized electrodes were evaluated in a symmetric planar microsupercapacitor using butyltrimethylammonium bis((trifluoromethyl)sulfonyl)imide aprotic ionic liquid as the electrolyte. The device exhibited extraordinary energy and power density values of 26 mJ cm(-2) and 1.3 mW cm(-2) within a large voltage cell of 2.5 V, respectively. In addition, the system was able to retain 80% of its initial capacitance after 15 000 galvanostatic charge-discharge cycles at a high current density of 1 mA cm(-2) while maintaining a Coulombic efficiency around 100%. Therefore, this multifunctionalized hybrid device represents one of the best electrochemical performances concerning coated SiNW electrodes for a high-energy advanced on-chip supercapacitor.

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“…Significant improvement of the electrode capacitance per planar surface area and nanowires length unit are achieved compared to electrodes made from SiNWs grown from gold colloids [138]. While Lefeuvre et al [139] developed highly organized SiNWs by hot wire assisted chemical vapor deposition (HWCVD) process.…”

Section: Chemical Vapor Depositionmentioning

confidence: 98%

Soft and Hard Surface Manipulation of Nanoporous Anodic Aluminum Oxide (AAO)

et al. 2015

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Nanoporous materials with straight channels have attracted considerable interest due to their unique physical properties and many potential applications such as separation, sensing, biomedical and electronics. For the last few decades, nanoporous alumina or anodic aluminium oxide (AAO) membrane is gaining attention due to its broad applicability in various applications. The unique properties of AAO membrane coupled with tunable surface modification and properties is playing an increasingly important platform in a diverse range of applications such as separation, energy storage, drug delivery and template synthesis, as well as biosensing, tissue engineering and catalytic studies. This chapter aims to introduce the recent advances and challenges for surface manipulation of AAO following the 'soft' and 'hard' modification strategies. The functions of these modified nanostructures materials and latest important applications are evaluated with respect to improved performance and possible implications of those strategies for the future trends of surface engineering are discussed.

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Ultra-dense and highly doped SiNWs for micro-supercapacitors electrodes

Cited by 61 publications

References 28 publications

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Designing 3D Multihierarchical Heteronanostructures for High-Performance On-Chip Hybrid Supercapacitors: Poly(3,4-(ethylenedioxy)thiophene)-Coated Diamond/Silicon Nanowire Electrodes in an Aprotic Ionic Liquid

Soft and Hard Surface Manipulation of Nanoporous Anodic Aluminum Oxide (AAO)

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