Ultraprecision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies

Abstract

SynonymsNanomachining; Nano-mechanical machining DefinitionUltraprecision machining refers to the ultimate ability of a manufacturing process wherein processing of a material at its lowest scale that is, at the atomic scale, is achieved. It is known that the lattice distances between two atoms are of the order of 0.2-0.4 nm; therefore, the ultraprecision machining refers to processing or removal actions of a manufacturing process in the vicinity of 1 nm. The process is also referred as "atomic bit" processing. To remove or process atomic bits, extremely large energy density is required, which is equivalent to the atomic bonding energy. The conventional cutting tools neither have high strength to sustain high specific cutting energy nor have hardness to sustain the tool wear. Therefore, ultraprecision machining refers to use of single crystal diamond (SCD) tools for ultrafine cutting