Uniform and Reproducible Barrier Layer Removal of Porous Anodic Alumina Membrane

A novel NEMS radiation sensor optimized for ultrahigh sensitive and isotropic detection of gamma irradiation is presented. The sensor is designed as a 3D symmetrical array of nanostructured platinum nanorod capacitor with 20 to 50 nm silicon oxide dielectric layer and a surface to volume ratio magnified by a factor of 5 × 10 3 to 8 × 10 5 as compared to bulk capacitor electrodes. For wide range gamma radiation doses from 5 to 35 kG using a Co 60 source in the ±90° angle range, the detected sensitivity is evaluated in the range of 800 nf/G compared to 1.1 pf/G for conventional bulk capacitive sensors, a factor of ~ 8 × 10 5 improvement.

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“…Two step anodization combined with a pore widening was utilized to fabricate a uniform PAA membrane template [8].…”

Section: Methodsmentioning

confidence: 99%

High performance NEMS ultrahigh sensitive radiation sensor based on platinum nanorods capacitor

2013

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“…Two-step anodization combined with a pore widening process was utilized to fabricate NAAMs with homogeneous pore diameters and high-quality pore walls [5,22]. The 1st anodization process was performed at 40 V in 0.3 M oxalic acid at 10 ∘ C for 3 h. After the removal of the nanoporous Al 2 O 3 , the second anodization was performed at the same conditions for varying lengths of time followed by the barrier-thinning process.…”

Section: Sample Fabrication and Characterizationmentioning

confidence: 99%

Effect of Pore Thickness and the State of Polarization on the Optical Properties of Hexagonal Nanoarray of Au/Nanoporous Anodic Alumina Membrane

Abukhadra

2015

Journal of Nanomaterials

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Hexagonal nanoarrays of Au particles were deposited on nanoporous anodic alumina membrane (NAAM) utilizing r.f. magnetron sputtering. The thickness of the NAAMs is adjusted by changing the second anodization time from 5 min to 20 min. The surface morphology, composition, and optical properties are characterized by using SEM, EDX, and spectrophotometer, respectively. The effects of the NAAM thickness and state of polarization on the morphological changes and on the optical properties of the fabricated nanoarrays were addressed. According to the measured optical spectra, the rate of decrease of NAAMs refractive index was found to be 3.825 × 10 −4 nm −1 . Using the modified Kubelka-Munk radiative transfer model, the energy gap of NAAMs was calculated from diffused reflectance and was decreased from 1.682 to 1.376 as the anodization time increased from 5 to 20 min. Also, the saturation of interference fringes is substantially enhanced, and field enhancement can be achieved due to the excitation and constructive interference of surface plasmon waves by coating NAAMs with the hexagonal nanoarrays of Au. Based on the advantages of the fabrication approach and the enhanced and controlled properties, this new generation of samples can be used as promising building blocks for nanophotonic and nanoelectronics devices.

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“…AAO templates can be obtained by a two-step anodization process of aluminum and is a low cost process for the fabrication of large arrays of nanostructures with a very large aspect ratio (pore depth divided by pore diameter), which is not possible with standard lithographic techniques [15]. AAO provides desirable features such as uniform pore sizes (5 to 400 nm), high pore densities (10 8 -10 11 /cm 2 ), and high aspect ratios [16][17].…”

Section: Introductionmentioning

confidence: 99%

On the design of high performance spiral inductors for communication system in a package (CSIP)

Yildirim

2015

2015 IEEE 65th Electronic Components and Technology Conference (ECTC)

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This paper presents the fabrication and characterization of high performance spiral inductors with a magnetic core on glass substrates. The porous anodic aluminum oxide (AAO) membranes with average pore diameter of 70 nm and thickness of 18 µm were fabricated and electroplated with Ni to serve as a magnetic core for spiral inductors. The 3.5 turns spiral inductors were fabricated on Ni-AAO membranes by using standard photolithography and Cu electroplating processes. The fabricated spiral inductors has a dimension of 1370 µm x 1010 µm with 5µm thickness, 15 µm trace width, 15 µm spacing, 400 µm outer diameter, and 220 µm inner diameter. The RF characterization of spiral inductors was performed over a frequency range of 1 -20 GHz. The inductance of spiral inductors with a magnetic core was measured to be 10.12 nH and enhanced 21% at 5 GHz compared to an air core of the same coil size. The quality factor of 14.48 was obtained at 5 GHz. The AAO template with ferromagnetic nanowires promises a great potential in serving as a magnetic core for fabrication of high performance spiral inductors for CSIP. IntroductionThere is a strong demand for high quality and performance integrated RF components such as, transformers, filters, oscillators, regulators, and matching networks for communication system in a package (CSIP). One of the fundamental passive elements for implementation of those components into CSIP is inductors. Among various means in integrating inductors into CSIP, spiral inductors have attracted most attention owing to its compact design and small form factor. However, inductance and quality factor of the spiral inductors do not scale efficiently with the number of turns, leading to excessive area consumption and limited operating frequency [1]. Thus, it is essential to increase inductance and quality factor at high operating frequency and compact size of spiral inductors for realization of CSIP.To further miniaturize the size, lower the cost, improve the performance, and increase the operating frequency of spiral inductors for CSIP, integration of ferromagnetic materials into an air core inductor has attracted much research interest. Ferromagnetic materials act as the flux-amplifying components in spiral inductors and correspondingly, inductance (L) and quality factor (Q) enhancement and area occupation reduction can be achieved in these inductors [2]. Different combinations of ferrites and soft magnetic metal-alloy films have been reported for integration into spiral inductors attributed to their magnetic and electrical properties such as high saturation magnetization, controllable anisotropy, single domain state, and high resistivity [1,[3][4][5][6][7][8]. However, spiral inductors with ferromagnetic cores suffer from poor

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Uniform and Reproducible Barrier Layer Removal of Porous Anodic Alumina Membrane

Cited by 39 publications

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High performance NEMS ultrahigh sensitive radiation sensor based on platinum nanorods capacitor

High performance NEMS ultrahigh sensitive radiation sensor based on platinum nanorods capacitor

Effect of Pore Thickness and the State of Polarization on the Optical Properties of Hexagonal Nanoarray of Au/Nanoporous Anodic Alumina Membrane

On the design of high performance spiral inductors for communication system in a package (CSIP)

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