Uniform deposition of large-area graphene films on copper using low-pressure chemical vapor deposition technique

Gürsoy, Mehmet; Çıtak, Emre; Karaman, Mustafa

doi:10.1007/s42823-021-00309-3

Cited by 7 publications

(11 citation statements)

References 36 publications

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“…Figure b shows the Raman spectra of graphene grown on Co films using different precursors at 420 °C. In general, the 2D/G ratio is used to judge the quality of graphene in the film, with a higher ratio indicating a higher quality. , At a given temperature, using benzene as a precursor on the Co film provides a higher 2D/G ratio than using acetylene. Figure c shows the Raman spectra of graphene grown on Ru films using different precursors at 470 °C.…”

Section: Resultsmentioning

confidence: 99%

Improving the Electromigration Life of Advanced Interconnects through Graphene Capping

Huang

Tsao

Chang

et al. 2023

ACS Appl. Nano Mater.

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Since the discovery of graphene, 2D materials are establishing a rapidly growing and promising field, with great potential for diverse applications given their excellent conductivity and high transparency. In particular, graphene can isolate external chemical reactions when applied to back-end-of-line (BEOL) interconnect metals, thereby preventing the oxidation of the interconnect metals. In addition, it can improve the conductivity and breakdown current density of interconnects. However, the thermal budget remains an important problem in BEOL interconnects. We demonstrate an advanced graphene deposition method using an in-house plasma plasma-enhanced chemical vapor deposition system, which offers low thermal budget and high stability. We also optimize carbon precursors to improve the quality of graphene on Ru and Co thin films. We show the improvement of electrical conductivity, electromigration lifetime, and maximum breakdown current density after capping Ru and Co interconnects with graphene. The electromigration lifetimes of the Ru and Co interconnects increase by 4 and 4.5 times, respectively, and their maximum breakdown current density increases by 17.6 and 10.6%, respectively. The results show that capping with graphene has a high potential in BEOL applications.

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Section: Resultsmentioning

confidence: 99%

Improving the Electromigration Life of Advanced Interconnects through Graphene Capping

Huang

Tsao

Chang

et al. 2023

ACS Appl. Nano Mater.

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“…Before graphene synthesis, the precleaning process was applied to copper foil, for which a more detailed description is given elsewhere. 29 Then the cleaned copper foil was placed in the middle of the quartz tube. First, the pressure was pumped down to 1 mTorr using a rotary pump.…”

Section: Graphene Synthesismentioning

confidence: 99%

Transfer of CVD-Graphene on Real-World Surfaces in an Eco-Friendly Manner

Yılmaz

Gürsoy

Şakalak

et al. 2023

ACS Appl. Eng. Mater.

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Here we report a one-step and all-dry transfer method for transfer of chemical vapor deposited graphene (CVD-graphene) on different application surfaces using pressure sensitive adhesive (PSA) material as the transfer medium, which is deposited on the application surface by the initiated CVD (iCVD) method in the form of a thin film. The as-deposited PSA film is a copolymer of acrylic acid and ethylhexyl acrylate, in which the relative amount of each component was shown to be a determining factor for the proper adjustment of the adhesive force required for the adhesion-based transfer process. With the help of the thin PSA film on the real-world application surface, graphene transfer was achieved with ease and at high quality by just peeling off the copper substrate, where CVD-graphene was initially deposited. With the all-dry and eco-friendly transfer procedure outlined in this study, it was possible to transfer graphene to a flexible large-area PET substrate (10 cm × 10 cm) on which higher conductivity values were obtained from the I− V experiments as compared with the graphene transferred using the classical wet approach.

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“…At present, the crystal domain size of graphene films is mostly from micrometers to millimeters, and it can even reach the centimeter level [ 27 ]. The current trend in the development of graphene films is to develop the controllable, rapid preparation of graphene films with a large area and large crystal domains via high-quality in situ deposition [ 28 ].…”

Section: Two-dimensional Graphenementioning

confidence: 99%

Recent Progress on Graphene Flexible Photodetectors

Wang

Xiao

et al. 2022

Materials

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In recent years, optoelectronics and related industries have developed rapidly. As typical optoelectronics devices, photodetectors (PDs) are widely applied in various fields. The functional materials in traditional PDs exhibit high hardness, and the performance of these rigid detectors is thus greatly reduced upon their stretching or bending. Therefore, the development of new flexible PDs with bendable and foldable functions is of great significance and has much interest in wearable, implantable optoelectronic devices. Graphene with excellent electrical and optical performance constructed on various flexible and rigid substrates has great potential in PDs. In this review, recent research progress on graphene-based flexible PDs is outlined. The research states of graphene conductive films are summarized, focusing on PDs based on single-component graphene and mixed-structure graphene, with a systematic analysis of their optical and mechanical performance, and the techniques for optimizing the PDs are also discussed. Finally, a summary of the current applications of graphene flexible PDs and perspectives is provided, and the remaining challenges are discussed.

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Uniform deposition of large-area graphene films on copper using low-pressure chemical vapor deposition technique

Cited by 7 publications

References 36 publications

Improving the Electromigration Life of Advanced Interconnects through Graphene Capping

Improving the Electromigration Life of Advanced Interconnects through Graphene Capping

Transfer of CVD-Graphene on Real-World Surfaces in an Eco-Friendly Manner

Recent Progress on Graphene Flexible Photodetectors

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