Unveiling polycrystalline silicon channel dissolution mechanism in wet etching process of 3D NAND fabrication

Zhou, Zihan; Wu, Yunwen; Han, Silin; Hang, Tao; Ling, Huiqin; Guo, Jie; Wang, Su; Li, Ming

doi:10.1016/j.surfin.2024.104515

Surfaces and Interfaces

2024

DOI: 10.1016/j.surfin.2024.104515

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Unveiling polycrystalline silicon channel dissolution mechanism in wet etching process of 3D NAND fabrication

Zihan Zhou,

Yunwen Wu,

Silin Han

et al.

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Unveiling polycrystalline silicon channel dissolution mechanism in wet etching process of 3D NAND fabrication

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References 43 publications

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