Updated BVD Modeling of AlN-based Solidly Mounted Resonators Working at Cryogenic and High Temperatures : From −160 °C up to 130 °C

Abstract

In this paper we present an updated version of the well-known one dimensional model for Solidly Mounted Resonators (SMRs) based on Aluminum Nitride (AlN) for harsh environments at 2.4 GHz in sensing applications. Our model covers from 22°C up to 422°C and presents this performance. Qa = 900, Qr = 350 and keff = 6.17% at 22ºC to a Qa = 380, Qr = 150 and keff = 5.48% at 422ºC Also we have verified our model using measurements from fabricated SMRs with an acoustic reflector of seven alternating layers of low and high acoustic impedance.