Using of vitreous chalcogenide semiconductors in microelectronic fabrication

Panasyuk, L. M.; Chapurin, I. V.; Ishimov, V. M.; Sidorina, S. G.

doi:10.1117/12.2298941

17th Congress of the International Commission for Optics: Optics for Science and New Technology 1996

DOI: 10.1117/12.2298941

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Using of vitreous chalcogenide semiconductors in microelectronic fabrication

L. M. Panasyuk¹,

I. V. Chapurin²,

V. M. Ishimov³

et al.

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Using of vitreous chalcogenide semiconductors in microelectronic fabrication

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