2021
DOI: 10.3390/cryst11091047
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UV Durable LCOS for Laser Processing

Abstract: Liquid-Crystal-On-Silicon (LCOS) Spatial Light Modulator (SLM) is widely used as a programmable adaptive optical element in many laser processing applications with various wavelength light sources. We report UV durable liquid-crystal-on-silicon spatial light modulators for one-shot laser material processing. Newly developed LCOS consists of UV transparent materials and shows a lifetime 480 times longer than the conventional one in 9.7 W/cm2 illumination at 355 nm. We investigated the durability of polymerizati… Show more

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Cited by 6 publications
(1 citation statement)
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“…On the other hand, micro electro-mechanical system (MEMS)-SLMs [15] with high reflectivity in the UV range and fused-silica acousto-optical modulators (AOMs) [16] with high transmittance were also used instead of LC-SLMs. Recently, SLMs that are relatively tolerant to UV laser light at wavelengths near 350 nm have become commercially available [17].…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, micro electro-mechanical system (MEMS)-SLMs [15] with high reflectivity in the UV range and fused-silica acousto-optical modulators (AOMs) [16] with high transmittance were also used instead of LC-SLMs. Recently, SLMs that are relatively tolerant to UV laser light at wavelengths near 350 nm have become commercially available [17].…”
Section: Introductionmentioning
confidence: 99%