2024 IEEE International Reliability Physics Symposium (IRPS) 2024
DOI: 10.1109/irps48228.2024.10529423
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V-Ramp VBD Prediction Method Using OCD-Spectrum and Deep-Learning, and Application to Early Detection of V-NAND Low Metal Reliability Risk

Sungman Rhee,
Sung-Pyo Park,
Sangku Park
et al.
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