“…Among five different phases of Ga 2 O 3 (α, β, γ, ε, and δ) [ 3 ], the orthorhombic β phase is the most stable thermodynamically, while the rhombohedral corundum α phase is semi-stable [ 4 ]. On the other hand, the band gap of α-Ga 2 O 3 is 5.3 eV [ 5 , 6 ], which is wider compared to β-Ga 2 O 3 4.9 eV [ 1 , 7 , 8 ], promising a higher breakdown field.…”