1999
DOI: 10.1016/s0141-6359(99)00019-7
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Vacuum measurement using total-internal-reflection heterodyne interferometry

Abstract: Based on the effect that the phase difference between s-and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula,… Show more

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Cited by 13 publications
(1 citation statement)
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“…We have proposed the heterodyne interferometric technique for measuring the optical phase resulting from optical activity [15] or total internal reflection [16]. With similar considerations, the schematic diagram of the optical arrangement for the grating displacement measurement is designed and shown in Fig.…”
Section: Heterodyne Interferometry For Measuring the Optical Phase Vamentioning
confidence: 99%
“…We have proposed the heterodyne interferometric technique for measuring the optical phase resulting from optical activity [15] or total internal reflection [16]. With similar considerations, the schematic diagram of the optical arrangement for the grating displacement measurement is designed and shown in Fig.…”
Section: Heterodyne Interferometry For Measuring the Optical Phase Vamentioning
confidence: 99%