To prepare for the lunar water exploration in the Chinese Lunar Exploration Project IV (CLEP), a new apparatus for studying characteristics of the water vapor conductance and water detection at low temperatures was built based on the flowmeter method, and the performance of the miniature time-of-flight mass spectrometer (TOF-MS) for water detection in the range -20 ~ 20 ℃ was measured. The through-put within the range of 3×10-9-9×10-6 Pa m3 s-1 was provided at temperatures in the range -60 ~ 20 ℃. The conductance of the orifice with a diameter of 21 microns for three gases (N2, Ar, and H2O) was measured at low temperatures. The diameter change of the metal orifice caused by the cold contraction in the molecular flow state is the main factor affecting the conductance, and the viscosity characteristic of gas in the viscous flow state is the main factor affecting the conductance. Therefore, the conductance of the orifice increases with the decreasing temperature when the through-put is high. In addition, the water vapor can be stably supplied by the orifice under low temperatures, and the conductance of water vapor through the orifice is measured through the on-line method and the time-ratio method. The adsorption rate and amount of water vapor on the metal surface increase with the decreasing temperature, hence the concentration of water molecules in the test dome significantly decreases as the temperature decreases. Finally, the through-put of water vapor of 8.75×10-8 Pa m3 s-1 was detected by the miniature TOF-MC at -20℃ on the apparatus.