2020
DOI: 10.1002/aelm.202000728
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Wake‐Up Effect in HfO2‐Based Ferroelectric Films

Abstract: HfO2‐based ferroelectric materials are promising candidates for next‐generation nonvolatile memories. Since the first report on Si‐doped HfO2 ferroelectric thin film in 2011, it has been confirmed that various dopants can induce ferroelectricity in HfO2‐based films, and the “wake‐up” effect in HfO2 films with different dopants deposited by different processes has been studied extensively. Recent developments in the wake‐up effect of doped HfO2‐based films are presented. Aside from the differences between the v… Show more

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Cited by 108 publications
(72 citation statements)
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References 90 publications
(129 reference statements)
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“…Such a wake-up is inevitably accompanied by the multidomain nature of the ferroelectric layer. 37–39 After 1000 cycles of wake-up pulse, this HfO x FTJ stack shows excellent properties with a 2 P r value of 35.4 μC cm −2 comparable to other conventional HfO x -based ferroelectrics, 2,3,34 indicating sufficient polarization for FTJ operation.…”
Section: Resultsmentioning
confidence: 78%
See 2 more Smart Citations
“…Such a wake-up is inevitably accompanied by the multidomain nature of the ferroelectric layer. 37–39 After 1000 cycles of wake-up pulse, this HfO x FTJ stack shows excellent properties with a 2 P r value of 35.4 μC cm −2 comparable to other conventional HfO x -based ferroelectrics, 2,3,34 indicating sufficient polarization for FTJ operation.…”
Section: Resultsmentioning
confidence: 78%
“…This is due to the local non-uniformity of domains and crystallinity in the HfO x thin film. 37–39 As cycling proceeds, the domains participating in the switching process become uniformly polarized in the same direction, and a complete hysteric P – V curve starts to appear, as shown in Fig. 1(e).…”
Section: Resultsmentioning
confidence: 94%
See 1 more Smart Citation
“…However, it has to be noted that wake-up effect is not a property genuine of a phase, [69][70][71] and different mechanisms can produce it. 3,[72][73][74][75] Assumptions of Qi et al, 68 which can be extended to the other authors reporting DFT calculations of ferroelectric HfO2 and other polymorphs, are based on strain states that differ to the experimental data revealed by XRD and STEM. 53,57,64…”
Section: Polar Phase Stabilized On Lsmomentioning
confidence: 97%
“…The training field was 600 kV cm −1 and the pulse duration as well as the relaxation time in between two voltage pulses were 100 μs. [ 33,34 ] We find reliable and persistent ferroelectric switching events with a degradation of the polarization of only 10% after 10 7 cycles. The ferroelectric hysteresis loops measured on both BiFeO 3 and La 0.15 Bi 0.85 FeO 3 are shown in Figure 3b and confirm the La‐doping‐induced decrease of the coercive field.…”
Section: Resultsmentioning
confidence: 87%