Water jet guided laser grooving of SiCf/SiC ceramic matrix composites

Hu, Tianrui; Yuan, Songmei; Wei, Jiayong; Zhou, Ning; Zhang, Zikang; Zhang, Jiaqi; Li, Xiaoqi

doi:10.1016/j.optlastec.2023.109991

Cited by 13 publications

(1 citation statement)

References 37 publications

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“…There are no obvious recast layers, cracks, or debris on the edges of the micro-grooves. As the laser power increases, the bottom of the micro-groove gradually darkens until it is no longer visible [95]. To achieve high-precision drilling, Li et al [96] proposed a method that involves laser direct drilling followed by secondary refinement of micro-crater shapes using coaxial water-jet-assisted laser drilling.…”

Section: Composite Processing 221 Laser-water Jet Composite Processin...mentioning

confidence: 99%

A Review of Femtosecond Laser Processing of Silicon Carbide

Wang,

Zhang,

Chen

et al. 2024

Micromachines

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Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involved in femtosecond laser processing of SiC. These methodologies encompass direct processing, composite processing, modification of the processing environment, beam shaping, etc. In addition, we have explored the myriad applications that arise from applying femtosecond laser processing to SiC. Furthermore, we highlight recent advancements, challenges, and future prospects in the field. This review provides as an important direction for exploring the progress of femtosecond laser micro/nano processing, in order to discuss the diversity of processes used for manufacturing SiC devices.

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Section: Composite Processing 221 Laser-water Jet Composite Processin...mentioning

confidence: 99%